판매용 중고 AMAT / APPLIED MATERIALS Centura 5200 ACP / EPI #160377

Systems, 12" Application: CMOS EG Elevated source drain (4) Chambers: (RH3) Reduced pressure EPI RP Chambers: Recipe control AssuSETT: Yes Lamp type: USHIO BNA6 Susceptor type: Silicon carbide coated graphite Pin type: Hollow silicon carbide coated graphite Preheat ring: Slotted silicon carbide, coated graphite Susceptor support shaft: Centerpost Upper heat shield: 6 Deg flared-in upper outer Gas delivery options: Gas panel feed: Bottom MFC type: STEC Z500 Pump purge: yes Regulators and displays: Transducers and regulators Transducer display type: English (PSI) H2 leak detector: Yes Gas pallets: Slot 1: H2 Main 50 SLM normally open Slot 2: H2 SLIT 10 SLM normally open Slot 4 MFC: HCI Wafer clean 200 sccm Slot 4 Restrictor: HCI Chamber clean 15 SLM restrictor Slot 5: HCI 20 SLM Slot 8: DCS 300 sccm Slot 9: DCS 1 SLM MLD Mainframe: Mainframe type: Core ENP block 2 Loadlocks: Batch load lock Chamber interface: Vented stainless steel insert and door with viton DVR record license:Yes Water hose fittings: Yes Chamber common and integration: Mass flow verification: MFV for 4 Chamber system Multi wafer clean: MWC for 4 chamber system Factory interface options: WIP delivery type: OHT WIP delivery Number of load ports: 2 load ports eDiagnostics ready: Yes Load port types: Enhanced 25 wafer FOUP V2 Load port operator interface: Standard 8 light Configurable colored lights: Yes Air intake system: Top intake E84 Carrier handoff: Upper E84 interface enabled OHT E84 PIO Sensors and cables: Upper E84 sensors and cables E99 Carrier ID: Keyence with BCR Operator access switch: Yes Light towers: 4 Color configurable light tower Platform application: EPI ACP block 2 Remote options: Monitor 1: 17" Flat panel with keyboard on ergo arm Monitor 2: Remote 17" flat panel on stand Monitor 2 Cable: 50 feet with 41 feet effective Pumps: Process chamber pumps: Edwards IH1000 pump interface only Pump isolation valve: Yes Currently powered off 2007 vintage.