판매용 중고 AMAT / APPLIED MATERIALS Centura 200 EPI #9384326

PECVD System, 8" Chambers: Chamber A: ATM Epi Chamber B: ATM Epi Chamber C: ATM Epi Chamber F: Single slot cooldown STD Transfer Wide body loadlock System voltage: 480V Frequency: 60Hz Transformer capacity: 480V to 208V / 300Amps CB1 Current rating: 300 Amps Leak detectors: Gas panel, H2 Mainframe exhaust: H2 Clean room monitor: TFT Stand alone Maintenance room monitor: TFT Stand alone Gas panels: Gas panel type: Configuable FUJIKIN Gas panel exhaust position: CH-A (Only for configurable type) Platter mixer Platter chamber-A Platter chamber-B Platter chamber-C (2) Mixed dopants (1) Silicon source Fujikin FCST Main H2: 100 slm Slit H2: 30 slm Minimum HCl: 1 slm Maximum HCl: 30 slm TCS: 20 slm Dope (INJ): 300 sccm Dope mixer (SRC): 500 sccm Dope mixer (DIL H2): 20 slm Pressure transducer (gauge) range: 0-45 Cabinet exhaust switch type: AMAT Mainframe: EPICREW Blower and heat exchanger Blower voltage: 480 VAC YASKAWA Variable speed blower Mainframe cabinet exhaust: Channel A side AMAT Lamp fuse tray and fuses AMAT Lamp C/B AMAT Lamp contactor AMAT Lamp harness assembly AMAT Gas lines (From gas panel to floor plate) AMAT Chamber tray AMAT Facilities water supply/Return connections Stainless steel water fittings Remote frame: CB1 Current rating: 300 Amp Umbilical cable length: 25 Feet V452 SBC Board AMAT Video card SSD 1 GB Hard Disk Drive (HDD) Chamber interface board: Chamber A, B and C AMAT SCR Driver AMAT SCR C/B AMAT SCR Contactor with fuses AMAT H/A Breaker to contactor Load lock chambers: Universal platform Wide body Wafer mapping Wafer slide detect Fast backfill Cooldown chamber: Type: Non-contact Center finder : On-the-fly N2 Purge restrictor size: 5 slm Transfer chamber: Transfer chamber lid hoist Robot type: HP AMAT Slit valve N2 Purge restrictor size: 5 slm x 3 Chamber A: Wafer sizes: 8" Standard process: ATM Ushio -B3G Lamps Rotation rev.R3.4 Exhaust line cone baffles (ATM) Reflector cones SWAGELOK Isolation valve Chamber B: Wafer size: 8" Standard process (ATM) USHIO B3G Lamps Rotation rev.R3.4 Reflector cones SWAGELOK Isolation valve Chamber C: Wafer size: 8" Standard process (ATM) USHIO B3G Lamps Rotation rev.R3.4 Reflector cones SWAGELOK Isolation valve Pallets for FUJIKIN: Model / Positions / Process gas / MFC Size FCST / 1 / H2 / 20000 FCST / 3 / H2 / 500 FCST / 5 / HC1-Hi / 30000 FCST / 6 / HC1-Lo / 1000 FCST / 7 / H2 / 100000 FCST / 8 / H2 / 30000 2021 vintage.