판매용 중고 AMAT / APPLIED MATERIALS 1600 #9156161

PECVD Chamber Front Front Monitor: Ok Back Monitor: Ok Load port: Sensors, Cass plate Signal tower: R,Y,G,W Robot: ATM robot & Vacuum chuck Slit door: Open Laminar flow: Load port laminar flow Wafer transfer module Robot: No Baratron gauge: No Buffer door lift : Ok Buffer Isolation valve: Ok Buffer throttle valve: Ok Cool chamber: Ok Process module CH# A RF Match: HMN302D CH# B RF Match: Ok CH# C RF Match: Ok CH# D RF Match: No CH# A Gate valve: No CH# B Gate valve : AV-4.0-MOD CH# C Gate valve: Ok CH# D Gate valve: Ok CH# A Throttle valve: 153F-4-100-2 CH# B Throttle valve: No CH# C Throttle valve: Ok CH# D Throttle valve: Ok CH# A Heater lift: No CH# B Heater lift: No CH# C Heater lift: Ok CH# D Heater lift: No Controller Board: DI/O,AI/O : Ok DC power supply: Ok CH# A Baratron gauge: MKS CH# B Baratron gauge :Ok CH# C Baratron gauge : Ok CH# D Baratron gauge : Ok Regulator box Span sensor: Ok Manual v/v & Regulator: Ok Gas panel NF3: 2SLM Ar: 300SCCM NH3: 2500SCCM N2: 5SLM SiH4: 500SCCM 1%PH3/H2: 1SLM H2: 3SLM B2H6 System control rack Interface board: DI / O, Seriplex, VME, CPU DC power supply: Ok Pump control module: Ok Servo DC power supply: Ok Main frame Power rack Generator Chamber A RFPP RF20S: 2666 Chamber B RFPP RF20S: NPG2K10S005 Chamber C RFPP RF20S: No Chamber D RFPP RF20S: No Pump Chamber A QMB500 + QDP80 Chamber B QMB500 + QDP80 Chamber C QMB500 + QDP80 Chamber D QMB500 + QDP80 TM pump QDP40 Load/Lock chamber QDP40 Scrubber: Main scrubber CDO859 Back-up scrubber CDO858 Heatexchanger SPEED-7000 Missing and ETC parts : ETC: Part step ( scaffolding ).