판매용 중고 AIXTRON G5 #293759860
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ID: 293759860
웨이퍼 크기: 6"
빈티지: 2016
System, 6"
Triple injector
Chamber / Loading cabinet
Gas mixing cabinet
RF Heater
Vacuum pump cabinet
(2) EBARA ESA80
Globe box
Antechamber
HORIBA MFCs
Maximum satellite temperature 1600°C
Epi Tune III
No transfer modules
No manual wafer Loading/Unloading
Source gas: SiH4, C3H8
Dopant gases: N2, TMAI
Process gases: H2, N2, Air, HCI, 3.8% H2 in Air
2016 vintage.
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