판매용 중고 AIXTRON G4 #293719549

MOCVD System, 4" Process: EPI (3) Gases: NH3, H2, SiH4 Glove box GMS Pump Particle filter Cable box RF Generator Transformer Gas configuration: Gas / Capacity SiH4 / 50cc (CM3A) NH3_2 / 30L (CM8A) SiH4 / 2L (CM6A) NH3_2 / 500cc (CM5A) NH3_1 / 500cc (CM5A) Dummy / Hyd_1 / 5L(CM7A) NH3_1 / 30L (CM8A) SiH4 / 1L (CM5A) Tmin_1 / 500cc (CM5A) Tmin_1 / 1L (CM6A) Tmin_1 / 2L (CM6A) Tmin_2 / 500cc (CM5A) Tmin_2 / 500cc (CM5A) Tmin_2 / 2L (CM6A) TEGa_1 / 500cc (CM5A) TEGa_1 / 500cc (CM5A) TEGa_1 / 2L (CM6A) Dummy / Mo2 / 2L (CM6A) MO / bypass / 30L (CM8A) Dummy / Mo1 / 2L (CM6A) CP2Mg_2 / 2L (CM6A) CP2Mg_2 / 500cc (CM5A) CP2Mg_1 / 2L (CM6A) CP2Mg_1 / 500cc (CM5A) TMAI / 2L (CM6A) TMAI / 500cc (CM5A) Power supply: 208 V, 3-Phase 2009 vintage.