판매용 중고 AIXTRON 3000 #9121782

Planetary reactor system P/N: 31010224 (95) Hi volume reactors, 2" MO-IR3000 Heating unit MOE-3000 Growth cabinet MO-V300 Low pressure system MO-EO Control cabinet MO-GO Gas blending cabinet Process materials: Trimethylaluminum: (ch3)3al Trimethylgallium: (ch3)3ga Trimethylindium: (ch3)3in Dimethylzinc: (ch3)2zn Phosphine: ph3 Arsine: ash3 MO-R3000 AIX MOCVD Reactor: Integrated in stainless steel glovebox Water cooled stainless steel Aluminum reactor Quartz plate Gas distributor Exhaust gas collector Hydraulic lift for reactor lid Double O-ring system LEYBOLD d1.6 pump Graphite susceptor: Current configuration: (95) 2" Wafers Supply: (4) 8" Wafers Tools for handling transfer system unit Mo-IR3000 AIX 3000 infrared heating unit: (30) IR Stripe heaters Power control unit (thyristor system) Current distribution Fused Individual control Electronic control system Water cooling system MOE-3000 Growth cabinet: Glove box with automatic pressure control containing: Planetary reactor AIX 3000 Inert gas purification system for glove box Achievable gas purity 1 ppm H2O and O2 Filters regenerative Control panel for glove box Low pressure operating unit MO-V3000 AIX 3000 Transfer chamber for reactor parts Wafer transfer chamber N2 Blow off gun Hydraulic system for reactor lid operation MO-V3000 Low pressure system: High capacity particulate filter Pressure sensor Throttle valve Pressure control (2) IF 100 Particle traps Vacuum valves Vacuum tweezers N2 Purge of pump Dual port MKS pressure readout PIS Indication system MO-EO Control cabinet: Ventilated steel cabinet for electronic control units Power supplies for reactor heater and electronics Control panel for reactor temperature with EUROTHERM 818s pid Control panel for reactor pressure regulation with MKS 652 Control panel for pneumatic valves in gas blending system Control panel for reactor cooling Control panel for double O-ring leak monitoring Control panel for moisture sensor Safety control: Hard-wired Pal programmable logic Computer control console Printer Emergency power off button Power distribution Signal distribution Mo-go gas blending cabinet: Exhausted steel cabinet Metalorganic Hydride sources Controlled temperature baths Integrated N2H2 distribution manifold Asec pressure regulators Run and vent lines Auxiliary lines for reactor Gas foil rotation Particle filters Check valves in all gas supply lines Pneumatic distribution panel Signal distribution panel Integrated pd-diffuser.