판매용 중고 AMAT / APPLIED MATERIALS Vantage #9226027

Rapid Thermal Processing (RTP) system, 12" Wafer type: SNNF A & B Chamber type: RTP Radiance RP vantage A & B RTP Radiance RP vantage chamber: Process application: Core anneal RTO & ISSG O2 Analyzer Lamp driver, P/N: 0190-17056 MFC 1: N2 50 slm HORIBA Stec sec-z12dmn MFC 2: O2 50 slm HORIBA Stec sec-z12dmn MFC 3: O2 5 slm HORIBA Stec sec-z11dm MFC 7: H2 20 slm HORIBA Stec sec-z12dm MFC 8: H2 3 slm HORIBA Stec sec-z514mgx MFC 11: He 30 slm HORIBA Stec sec-z12dm MFC 12: He 50 slm HORIBA Stec sec-z12dm MFC 13: N2 100 slm HORIBA Stec sec-z12dmn WRLD Maglev assembly, P/N: 0190-14175 Interface options: OHT WIP Delivery Loadports Enhanced 25-wafer foup OHT Light curtain Chamber A interface: Radiance interface panel, P/N: 0465-07030 Chamber B interface: Radiance interface panel, P/N: 0465-07031 Remote options system monitor: Monitor 1: Flat panel with keyboard on stand, P/N: 0395-00099 Monitor 1 cable, 25 Foot Monitor 2: Through the wall flat panel with keyboard, P/N: 0460-50048 Monitor 2 cable, 25 Foot Umbilicals: Chamber AC Box to heat exchange, 75 Feet H/A, AMAT / APPLIED MATERIALS KVM to user interface with EVC, 25 FT P/N: 0140-06462 / 0150-13813 / 0150-14109 Robot, YASKAWA BTV Darp manipulator, QS Vantage FI, P/N: 0220-39516 Reflective wafer on blade, P/N: 0220-39702 Cables, P/N: 0150-14109 / 0150-13813 / 0140-06462 (2) Facility brackets / Covers (2) Front monitors, keyboards & bezels Exhaust line and KF flex hoses Gas line adapter: 90° Elbows Options & electrical requirements: Line voltage: 200/208 V System safety equipment Mainframe Process chamber options No heat exchange No rough pumps 2006 vintage.