판매용 중고 TEL / TOKYO ELECTRON P-8XL #9161662

Automatic wafer probers Diameter: 6"-8" Thickness: 150~1000 um Max.Weight: 110g Die size: 300~99999 um Stage: Contact accuracy(X,Y axis): ±6um (1995) ±4um Probe to pad Contact accuracy(Z axis): ±5um (1995) ±5um Z Chuck strength: 60kg Deflection spec: 15um (Vertical) 8um (Horiz) @ 10kg 90mm From center Z Acceleration: 1.0G Z Stroke (maximum): 95mm Z Probe range: 65.8mm to 93.3mm Z Maximum velocity: 40mm/s XY Stage / Platen: Accuracy: Each axis ±2um XY Stroke: ±118mm (X) 230~-110mm (Y) Max. speed: 200 mm/sec Acceleration: 2.2G X: 2.2G Y: 2.2G Resolution: 0.4 um Vibration (resonant): X: .70 um Y: .42 um Overall accuracy, X,Y,Z, Q, PTPA: X, Y and PTPA -- +/- 4 um @ 22C to 28C Z and PTPA +/-5um @ 22C to 28C APTPA Accuracy (Guaranteed probe marks using APTPA): X/Y: ±6um Z: ±5um Chuck mechanism: Rotation range: ±7.0 Degree Angular resolution: 0.00022 Degree Pre-align section: Rotation speed: 360 Degree/sec Alignment accuracy: XY±300um Theta accuracy: ±0.17 Degree Control resolution: (1) Degree Alignment system: LED Alignment : Automatic self-teach & align: Yes Temperature compensation: Every wafer Auto set-up camera: Bridge camera Macro mode 　 Magnification: 0.41 Viewing area: 15.6 X 11.7mm Medium mode (TEL shiva option) 　 Magnification: 3 Viewing area: 2.1 X 1.6mm Micro mode Magnification: 17.8 Viewing area: 0.36 X 0.28mm DPS Camera: Resolution　 Macro mode 　 Magnification: 0.8 Viewing area: 5.85 X 7.8mm Micro mode　 Magnification: 12 Viewing area: 0.39 X 0.52mm Display:　 Type : TFT LCD Touch panel Graphic function: Yes Full color: (8) Colors Bin color: Eye level Position: Everything on LCD panel Probe card changer: Load & unload: Auto Max. probe card size: 350mm Need to do wafer unloading first: No Parameter storage:　 Remote set-up option: Yes FDD: 3.5" 1.6M HDD: 2.5" 352M Manipulator:　 Type: Motor Swing motion: Stable Remote control: Available Hinge swing safety warning: Yes Positioning accuracy (XYZ).