판매용 중고 SCT AXIS IIIL #293738380
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ID: 293738380
Sputtering system
(3) Cathodes
VAT PM-5 Throttle valve controller
Vacuum relay switch box
Computer electronics bay
Chamber body with load lock cryo
COMDEL RF Match box controller
SORENSEN DC Bias power supply
ADVANCED ENERGY DC Power supply
ENI RF Generator
DC Volt meter for carrier DC bias power supply.
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