판매용 중고 ACCUTHERMO AW 610 #9185462

Rapid thermal processing system, 2"-6" Main frame with wires Pentium® class computer with LCD monitor, 17" Mouse and standard keyboard Aluminum oven chamber Water cooling passages Gold plating plates Door plate with TC connection port Isolated quartz tube without pyrometer window / with pyrometer window Oven control board Main control board Bottom and top heating with 21 (1.2kW) radiation heating lamp module (4) Bank zones: Top: Front and rear Bottom: Front and rear Quartz tray: 4" to 6" Round wafer / Customized Gas line with gas MFC without shut-off valve T-Shape quartz with qualified K-type TC Holder: 100°C-800°C Temperature measurement Thermocouple wires: (5) pcs Ramp up rate: 10°C to 120°C/sec Maximum rate: 200°C Steady state duration: 0-300 sec/step Ramp down rate: 10°C to 200°C/sec Steady state temperature range: 150°C - 1150°C Maximum: 1250°C ERP Pyrometer: 450-1250°C With ±1°C accuracy Thermocouple: 100-800°C with ±0.5°C accuracy Temperature: Repeatability: ±0.5°C Uniformity: ±5°C across, 6" Gases used: N2 O2 Ar He Forming gas NH3 N2O2 Options: MFCs with extended gas Box and gas control board Carrier or susceptor: Small sample Transparent substrate Substrate with metal thin film on top Patented ERP pyrometer (400-1250°C) Non-contact high temperature sensor Chiller for ERP pyrometer Single point for pyrometer calibration Omega meter for pyrometer and thermocouple calibration Shutt-off valve for quartz tube Lamps cooling control Spare parts Type: Atmospheric RTP RTA Desktop Manual loading PC Controller with real time control technology Lamp heating: Top and bottom (21) Lamps (4) Lamp zones: 3 Phase (2) Lamp zones: 1 Phase Isolated quartz tube Gold plating plates: Top Bottom Front Rear Left Right Water cooled oven chamber Substrate size, 6" Substrate thickness: <7 mm Substrate material: Transparent Semitransparent Nontransparent Substrate shape: Round / Square / Abnormity Highest temperature: 800-1250°C Temperature sensor: TC Longest steady time @1000°C: 5mins Vacuum pressure control: No Chamber cooling: Maximum: 35°C Dew point: 3°C Pre-filtered water Susceptor material: Graphite with SiC coating / Customized Options: Temperature sensor: ERP Omega meter: CL23A Susceptor: Base and cover Gas line: 1 Dimension: 17”x18”x11” (DXWXH) Gas line: 2 tot 4 Dimension: 17”x26”x11” (DXWXH) Gas line: 5 to 6 Dimension: 17”x30”x11” (DXWXH) Power : 1 Phase / 3 Phase 50/60 Hz AC 200V, 208V, 220V, 380V, 415V Amps: 70 / 100 CE Marked.