판매용 중고 ACCUTHERM AW 820V #9185477

Rapid thermal processing system, 2"-8" Vacuum pressure: 50m Torr to 13 Torr / 13 Torr to 760 Torr Ramp up rate: 10°C to 120°C per/sec Maximum rate: 200°C Steady state duration: 0-600 sec/step Steady state temperature range: 150°C - 1150°C Maximum: 1250°C K-Type TC temperature accuracy: ±1°C Thermocouple temperature accuracy: ±0.5°C Temperature: Repeatability: ±0.5°C Uniformity: ±8°C across a 8" Gases used: N2 O2 Ar He Forming gas NH3 N2O2 Main frame with wires Pentium® class computer with touch screen monitor, 15" Mouse and standard keyboard Aluminum oven chamber Water cooling passages Door plate with TC connection port Top and bottom quartz windows Heating module with 27 (1.2kW) radiation lamps (4) Bank zones Top: Front and rear Bottom: Front and rear Oven control board Main control board Quartz tray: 5"-8" Round wafer (2) Gas lines with gas MFCs with shut-off valve Main vacuum valve Options: Atmospheric process function Vacuum pressure measurement and control function Turbo pump for up to 10-6 Torr Vacuum pump: Mechanical Dry Multiple process gases MFCs (Up to 4) with gas control board K-Type TC assembly for high temperature Carrier / Susceptor: Small sample Transparent substrate Substrate with metal thin film on top Omega meter thermocouple calibration Shutt-off valve for quartz tube Lamps cooling control Spare parts Type: Vacuum RTP RTA Stand alone Manual loading PC Controller with real time control technology Lamp heating: Top and bottom (27) Lamps (4) Lamp zones Isolated quartz tube: No Gold plating plates: Top and bottom in lamp module only Water cooled oven chamber Substrate size, 8" Substrate thickness: <10 mm Substrate materials: Transparent Semitransparent Nontransparent Substrate shape: Round / Square / Abnormity Highest temperature: 800-1250/1500°C Temperature sensor: TC, Special TC Longest steady time @1000 °C: 30 mins Vacuum pressure control: 50m Torr to 13 torr (Option) / 10-6 Torr Chamber cooling: Maximum: 35°C Dew point: 3°C Pre-filtered water Susceptor material: Graphite with SiC coating / Customized Susceptor size: 4, 5, 6, 8, 4"x 4”, 5" x 3”, 16" x 2” Base pressure: 50m Tor / 10-6 Torr Options: Omega meter: CL23A Process gas lines with MFCs: 2, 3, 4, 5 Atmospheric function Susceptor: Base and cover Power : 3 Phase 50/60 Hz AC 200V, 208V, 220V, 380V, 415V Amps: 100 CE Marked.