판매용 중고 OLYMPUS AL-3300 #9361274

Inspection system, 8"-12" Wafer type: Notch (semi standard) Cassette: FOUP / FOSB, (25) Slots (semi standard) Wafer transfer: High-speed horizontal wafer transfer robot system Cassette number: 2 Cassette positioning: Kinematic coupling pin Cassette loading: AGV, RGV, PVG Sensors: Cassette detection Wafer mapping detection Wafer stick-out detection Transfer methods: Return to original slot Unload to another cassette Sorting: Unload according to classification Inspection unit: X-Y Stage: Vacuum hold Theta 360° rotation Repeatability: 20 µm Z-Step: 0.5 µm, 200 mm/Second Alignment accuracy: ±50 µm Inspection method: Bright field Dark field DIC DUV DUV Confocal LED Illumination Autofocus objectives : 5x-150x With BF Observation: DF and DIC Reflection: ≥4% at 780 nm, Class IR laser diode Video camera: 1/1.8" CMOS Color camera DUV Unit: Wavelength: 248 nm, ±10 nm Xenon mercury bulb Disk confocal function Video magnification: 2.5/3.5 Motorized switch over Resolution: 0.08 µm Line and space Macro unit: Method: Motorized swing with joystick Rotation: Variable speed 3-30 Sec/Rev Swing angle: Top: X and Y ±30° X-Axis back: 0°-30° Y-Axis back: 0°-120° Mini-environment: Full area down flow: ≥99.9995% Particle size: 0.1 to 0.2 µm at 0.3 m/s System controller: Industrial PC With LED monitor, 17" Operating system: Windows 7 English OS Hard Disk Drive (HDD): (2) 1TB RAM: 4GB M5 Terminal block Vacuum : -67 KPa, 20 Liter/Min Compressed dry air: ≥0.49 MPa, 160 Liter/Min of low rate Swagelok polyurethane tube outer size: 1/4" Power supply: AC 208 V ±10 %, 50/60 Hz, 4.5 kVA.