판매용 중고 BRUKER-AXS Insight 3D #293753502
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ID: 293753502
웨이퍼 크기: 12"
빈티지: 2009
Atomic Force Microscope (AFM), 12"
CD Performance:
Static accuracy: 3σ < 1.1%
Dynamic accuracy: 1.2 nm (3σ)
Throughput (9 -Sites): 14 WPH
Minimum pattern spacing: 40 nm
Depth performance:
Static accuracy: 3σ < 0.4%
Dynamic accuracy: 0.5 nm (3σ)
Minimum pattern spacing: 30 nm
3D Imaging:
Scan size: 49x49 µm
Noise: 0.1 nm RMS
2009 vintage.
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