판매용 중고 NIKON OPTISTATION 7 #9234683

Wafer inspection system, 12" Cassette type: FOUP 25 Wafer Chuck materials: PEEK Transfer robot Optical system: BF/DF Auto forces function Remote operation: Magnification changer, BF/DF changer, AS, FS Microscope stage pre-alignment accuracy: Eccentricity: 3σ ≤ 35µm Attitude angle: 3σ ≤ 2° Optical system: Infinity optical Objective lens: BF/DF Observed BD-PLM 5x, 10x, 20x, 50x, 100x Eyepiece lens: CFUWN 10x (F.N.25) Observation tube: Super wide field trinocular tilt observation tube UWTT Eyepiece angle: 10° to 30° Motorized revolving nosepiece: Quintuple for BF/DF Microscope illumination: 12 V, 100 W Halogen lamp Throughput: Macro-inspection (2 Sec) Cassette all point ≤ 6 min 30 sec Micro-inspection (5-Points, per 1 sec) ≤ 10 min Auto-focus: Detective method: LED Illumination slit projection AF Illumination source LED: Wavelength 770 nm Observed method: BF/DF Eyepiece lens: 10x-150x Stage: X-Y Stage: Observed area, 12" θ Rotation: Rotating angle: 3.5° Pre-alignment type: Non-contact pre-alignment Eccentricity: 3σ ≤ 35µm (X,Y) Attitude angle: 3σ ≤ 2° Arm type: Belt drive FOUP (Load port): ASYST FL300S3 Side loading type port SEMI (E-15-1) Standard Alignment load wafer Illumination source: LED 910 nm Detector: Photo-transistor (PT) Eccentricity: Macro-stage ≤ ± 1.5 mm Macro stage Surface macro Auto drive Tilt angle: Infinity Speed: ≤ 15 RPM Angle: -90° to -120° Special halogen lamp L1L-100 Backside macro: 15 V, 100 W Halogen lamp (Fiber illumination type) 2007 vintage.