판매용 중고 KLA / TENCOR SP1-TBI SURFSCAN #9115137

System, 8"/12" or 6"/8" Single Station, Dual Station, 4 Stations and DFIMS are available to convert Properties: SEMI standard wafer thickness and geometry Material: Silicon wafers that scatter 10% of incident light Defect Sensitivity (PSL sphere equivalent) 0.08 diameter, normal illumination 0.06 diameter, oblique illumination (optional) 95% capture rate Haze Sensitivity: 0.005ppm Repeatability Count: CV1 1.0% (Mean count 2000, 0.155 diameter latex spheres) Edge Exclusion: 3 mm XY Coordinates (optional) Coordinate Accuracy: 80th percentile 20 Throughput (200mm): Up to 125 wph @ 0.08 Front side Contamination: 0.001 particles/cm²/pass 0.12 Cassette Handling Standard: Single puck with one cassette station Illumination Source: 30mW Argon-Ion laser, 488nm wavelength Operator Interface: Keypad, pointing device and keyboard standard Operating System: Windows NT 4.0 Installation Requirements: Vacuum: 20KPa (24”Hg) Electrical: 200-240V 50/60 Hz Power Requirement: 5.4 kVA Ducted Venting: Two 102mm (4”) exhaust hoses Environment: Class 10 or better SP1/TBI 4Station, SP1/TBI 4 Station, SP1/TBI 4 Stations, SP1/TBI DFIMS SP1/DLS 4Station, SP1/DLS 4 Station, SP1/DLS 4 Stations, SP1/DLS DFIMS SP2 and SP2/XP 12" DFIMS are also available.