판매용 중고 KLA / TENCOR Archer AIM+ #9237846

Overlay inspection system, 12" (2) ASYST IsoPort SMIF Systems (2) Load ports Handler system: Modular wafer handler, 12" HLS Lamp YASKAWA Robot Options: CMP Option (Low contrast target measurement) Multi-layer XY separation RDM V3XX Tool client license Archer analyzer on-tool client license Archer analyzer Pro-5 license Tool internal camera for surveillance Automation: GEM/SECS and RS232 HSMS E84 Enablement for OHT & AGV/RGV E87 Carrier management services (Based on E39) E40 Process job management E94 Control job management E90 Substrate tracking (2) Advantage radio frequency (RF) carrier ID readers Light tower EMO Shield Network interface: HSMS, GEM/SECS SEMI Wafer standard with notched orientation Cassette type: 25 Wafer FIMS-ENTEGRIS Spectra 26 slots FOUP 25 Slots Factory interface items, material interface, LP: (2) FOUPs Dual FIMS ENTEGRIS Top shelter for subfab components Side panels Chemical filters for FFU: Air inlet of fan force Options: CMP Option (Low contrast target measurement) Multi-layer XY separation RDM V3XX Tool client license Archer analyzer on-tool client license Archer analyzer Pro-5 license Tool internal camera for surveillance UPS Manuals included Power supply: 230 V, 50 Hz, 15 A, Single phase 2005 vintage.