판매용 중고 AMAT / APPLIED MATERIALS SemVision CX DR-300 #9159930

Automated defect review metrology system, 8"-12" Wafer shape: Notch Wafer handling: Loader: SMIF / OCLP / AOD FFU With ULPA filter SEM / EDX Column Tilt: 45 Deg column Stage wafer holder 3 PIN ETU 8" / 12" ITU 8" / 12" Aligner Electron optical system: Acceleration voltage: 150V - 15000V Probe current: 10pA - 1.2nA SEM Resolution: 4nm @1KV Magnification: x200 - x200000 Maximum pixel: 1440 Multi perspective SEM imaging (MPSI) VC Model (voltage contrast) Optical microscope system: Bright light / Dark field microscope Objectives: 5x, 20x and 100x SECS / GEM Communication interface: Defect file format: Functionality confirmed to KLARF Output file format: Same as input format Host communication (SECS II / GEM /HSMS) Wafer stage: Stage accuracy: ±1.5um Unique die-to-die Single image automatic defect review (ADR) Automatic defect classification (ADC) Un-pattern review Automatic process inspection (API) E-Chuck stage: No (Pins stage) Anti charge-3 (E-SEM) Peripherals : Port 1 / Port 2 type: OCLP EDX Tilt and rotation Remote work station Resolution target: Regular Signal tower: Standard EPDU FIB: No Facility: Largest load ampere rating: 8 A Full load current: 10 A Interrupt current: 10,000 Amps I. C. Supply voltage: 1-120 VAC, 1 Phase, 3-Wires Power requirements: 208 V, 3 Phase, 5-Wires, 50/60 Hz 2001 vintage.