판매용 중고 EVG / EV GROUP IQ #293705990

ID: 293705990
웨이퍼 크기: 6"-8"
빈티지: 2008
Mask aligner, 6"-8" Top Side Alignment (TSA) Back Side Alignment (BSA) CCD Camera Motors encoders limit switches sensors pneumatic Automatic alignment for top and / or bottom side Reinforced stage drives: X/Y/Theta axis Automatic wedge compensation Substrate and mask Objectives lens: 5x, 10x SP6400169 Shutter unit Hg lamp: 500 W / 1000 W Fully motorized split field microscope for bottom side view with CCD camera Motorized swivel arm wafer loading trays for wafer size IC devices PC 2008 vintage.
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