판매용 중고 VARIAN VIISta 80 #178078

High current ion implanter, 8" Energy : 200eV to 80KeV Bernas Source with 5 Gas Stick - 90D Magnet Module and Gas Box Module Beam energy probe for D1 & D2 Module - 90 D Magnet Module and 70D Magnet Module High Resolution 90 D analyzer magnet - 90D analyzer magnet & Rods (10EA) 70 D magnet module providing uniformity & parallelism control, plus energy filtering - 70D Analyzer Magnet Multipoles(11EA) & Upper Rods(12EA), Low Rods(12EA) Profile Faraday to ensure uniform beam current distribution - Indirect Drive Profiler Assembly (Need to Upgarde, In-Vac Profiler or Rack and Pionion)- End Station Module Multiple Faraday systems for beam angle measurement & real-time monitoring - Dose Cup (Samping Cup) - End Station Module Recipe interlockable incident angle control system - End Station Module Dual plasma flood gun system - End Station Module Gas Box with 5 Gas Stick - Gas Box Module CES End-Station - End Station Module End station with orientation control 0~360 degree at +/- 1 degree accuracy - End Station Module Tilter-C Platen - End Station Module Precise control of tilt angle at +/- 0.1 degree accuracy - End Station Module - X tilt N2 Gas +Water Cooled electro-static platen , with 1KW or 2.4KW Chiller - End Station Module - Excluded Chiller Assembly only. Vertical scanning using linear servo motor driven, industrial air bearing - End Station Module Dual 25 wafer capacity, equipped for 200mm wafer sizer operations - End Station Module (3) CTI Cryo-Torr 8F cryo pump at process chamber - End Station Module (2) PFEIFFER TPH2101UPC DN 250 ISO-K, 3P - Source & Beamline Turbo Pump - Included 90D Magnet Module and 70D Magnet Module each. (2) Loadlock Turbopump - Varian 300HT and Pfeiffer - End Station Module (2) Alcatel ADS501 Roughing Pump - Source, Edwards Roughping Pump - E/S (2) Varian TriScroll Pump and Varian Membrane Pump - Included Tool Control Rack Module Module Division: Gas Box Module Facility Module -208V, 3P, 5W, 50KVA with UPS 90D Magnet Module 70D Magnet Module Source Control Module with Source Isolation Transformer Tool Control rack Module End Station Module Parts: 90D Waveguide 70D Waveguide Profiler Assembly Source Dry Pump - Alcatel: ADS501 E/S Dry Pump - Edwards Chiller Assembly (Affinity 1KW or 2.4 KW) D.I. Water Pump Assembly with Filter Service Monitor Assembly (2) Compressor Assembly (9600) (13) Door Assemblies (Right: 5EA, Left: 5EA, Rear:2EA, Inside Center: 1EA) Door Lead Panel Assemblies Roof Lead Panel Assemblies Roof Beam Assemblies Door Post Panel Assemblies (Frame) Roof Post Panel Assemblies (Frame) (2) CTI Cryo Pump - Excluded for cleaning the Chamber of E/S from E/S Module (2) Gate Valve and Housing - Excluded for cleaning the Chamber of E/S from E/S Module Lead Floor Assemblies D2 Lens Assembly Lelium Line MISC Parts (miscellaneous) Currently crated and stored in a warehouse 2000 vintage.