판매용 중고 VARIAN Spare parts for E1000 #293767980
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ID: 293767980
Part number / Description
E11081472 / Hook site with silicon recoating, 8"
1730113 / PCB Color graphic service display
E15001612 / Servo control PCB
113085001 / Vacuum gauge controller
E15001612 / Servo control PCB
E15002350, D-E150023, E15002363 / PCB Power supply controller
113085001 / Vacuum gauge controller
112839002 / Disk water union
4EKGF63DX-4 / Load lock thin-film pump
E19002631, E19002632 / Filament, PS, 1kW
E19002571 / Suppression power supply 25kV/10mA
- / Source can
E11021390 / Wafer handler interface controller.
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