판매용 중고 VARIAN E500 #9206611

Medium current ion implanter, 6" Signal tower: Front panel Platen type: M-clamp Loadlock: Left, right No CVCF Option System vacuum: Ion source chamber Beamline chamber End station chamber Pumps: Terminal: Dry pump Turbo pump & (3) controllers E/S Chamber: Dry pump Dry pump / Booster pump Cryo pump L/L Cryo Maker / Model / Class EDWARDS / QDP80 / Terminal dry PFEIFFER / TPH 1600 / Source TMP PFEIFFER / TCP 5000 / Source TMPC PFEIFFER / TPH 510 / Resol TMP PFEIFFER / TCP 310 / Resol TMPC PFEIFFER / TPH 240 / Beamline TMP PFEIFFER / TCP 121 / Beamline TMPC CTI / 250 / Endstation C/P CTI / 8500 / Compressor VARIAN / CTI100 / Loadlock TMP VARIAN / CTI100 / Loadlock TMPC EDWARDS / 5020+boost / End station dry Process gas: AsH3: HP Type, VCR 1/2" PH3: HP Type, VCR 1/2" BF3: HP Type, VCR 3/8" Ar(N2): HP Type, CGA 580 (Non gas line) High voltage range: Extraction power supply: 0 keV~70 keV Acceleration power supply: 0 keV ~ 180 keV Power supplies: Arc: 300VDC, 15A Filament: 7.5VDC, 200A Source magnet: 20V, 50A Extraction: 70kV (Max:75kV), 50mA Extraction suppression: -2kV, 50mA Analyzer magnet: 40V, 125A (Max:150A) Mirror power supply (decel): 30kV, 2.5mA Quadrupole magnet #1: 20V, 50A Quadrupole magnet #2: 20V, 50A Scan generator controller: -30kV, 10mA Mirror: 60kV, 1.2mA Dipole lens magnet: 40V, 125A (Max:150A) Acceleration: 180kV, 5mA (-> 8mA) Acceleration suppression: -5 kV, 5 mA Scan trek power supply: 30 kV Isolation transformer assy: 70 kV Controller (Assembly): Left arm servo Right arm servo Vacuum gauge Scan faraday Platen tilt servo Vertical lift orienter Uniformity Liner motor servo amp Orienter Left elevator Right elevator Dose integrator DI Temp monitor Options: No beam energy probe No 2 step beam reduser No auto deceleration Gas box type: HP Source type: Bernas Faraday type: VARIAN Scanning faraday Utilities: Air: 100~150 psi N2: 40~150 psi Cooling water: 60~150 psi Temperature: 4~21°C Power: 208VAC, 3-Phase, 5 Wires, 43.2kVA, 120FLA 1993 vintage.