판매용 중고 VARIAN E500 #9085170

Medium current ion implanter, 6" Signal tower: front panel Production wafer qty: single wafer Platen type: M-clamp Load lock: Left, right (walkout sensor) System Vacuum: Ion source chamber Beam line chamber End station chamber Terminal dry: Ebara 4020 Source TMP: Seiko STP-1000C Source TMPC: Seiko STP-1000C Resol TPM: Seiko STP-301C Resol TMPC: Seiko STP-301 Beam line TMP: Seiko STP-1000C Beamline TMPC: missing Endstation C/P: CTI On-Board 10F Compressor: Suzuki Load lock TMP: Varian CTI100 Load lock TMPC: Varian CTI100 Endstation dry: Ebara 5020 + boost Process Gases: AsH3: SDS type, VCR 1/2" PH3: SDS type, VCR 1/2" BF3: SDS type, VCR 1/2" Ar(N2): DISS type, CGA 580 Power Supplies: Arc: 300VDC, 15A Filament: missing Source Magnet: 20V, 50A Extraction: missing Extraction suppression: missing Analyzer magnet: 40V, 125A (Max 150A) Mirror power supply: 30kV, 2.5mA (2) Quadrupole Magnet: 20V, 50A Scan generator: -30kV, 10mA Mirror: missing Dipole lens magnet: 40v, 125A (Max 150A) Acceleration: missing Acceleration suppression: -5kV, 5mA Acceleration stack: missing Controller: Left Arm Servo Right Arm Servo Vacuum gauge Scan faraday Platen tilt Servo Vertical lift orienter Uniformity Linear motor servo amp Orienter Left elevator Right elevator Dose integrator DI Temp Monitor Terminal PD DC PS: missing Options: Beam energy probe: yes 2_step beam reducer: not used Auto decel: missing Gas box type: HP (2 SDS bottles, insert) Soruth type: Bernas Faraday type: Varian scanning Faraday Vaporizer PS: none Utilities: Power: 208VAC, 3 phase, 5 wires, 43.2 KVA, 120 FLA Air: 100 ~ 150 PSI N2: 40 ~ 150 PSI Cooling water: 60~150 PSI, 4-21°C High Voltage Range: Extraction power supply: 0 keV - 70 keV Acceleration power supply: 0 keV - 180 keV 1995 vintage.