판매용 중고 VARIAN E220HP #9237387

Ion implanter, 8" Main components: End station module Terminal module Services module PC & Monitor Accel column Accel stack Accel PSU & tray Accel suppession PSU Decel PSU Enclosure Signal tower & HV lights Signal tower controller box Exhaust leakage box No remote PC & monitor End station services module: Right arm servo controller Vacuum gauge controller Scanning faraday controller Platen tilt servo controller Uniformity controller Liner motor servo controller Orienter controller Left elevator controller Right elevator controller E-Chuck clamp PSU Dose integrator controller D.I. Temp monitor Vertical lift orienter No electric flood controller No UPS Terminal PSU & Assy: Set-up faraday cup assy Extraction manipulator Motion controller Swing out arm decel Relay arm decel assy Set-up mirror assy Neutral dump assy Anal beam dump assy Source mag assy Anal mag assy Quad mag assy Lens mag assy Scan controller Scan generator: 20Kv Set-up faraday pre-amp Vacuum gauge controller Scan assy Analyzer PSU Extraction PSU Lens PSU Suppression PSU Mirror PSU: 30 Kv Source mag PSU No 30 Kv scan generator No Mirror 60 Kv PSU Source head & gas cabinet: Source head Arc PSU Filament PSU No vaporizer No vaporizer PSU Gas module: (2) AsH3: SDS PH3: SDS (3) BF3: SDS (4) Ar: Diss, CGA 580 Vacuum system: EDWARDS / SEIKO SEIKI STP-1000C Source turbo pump EDWARDS / SEIKO SEIKI STP-300 Resolve turbo pump EDWARDS / SEIKO SEIKI STP-1000 End station cryo pump CTI 250F Load / R cryo pump CTI 4F Load / L cryo pump CTI 4F Beam-line turbo pump 1995 vintage.