판매용 중고 VARIAN E220HP #9194813

Ion implanter, 8" General configuration: Terminal module / Beamline: Scan generator: 20KeV Mirror: 30KeV Automatic graded decel option: Decel relay & P/S: No Hall probe option: No End station module: Wafer handler platform type: Standard Platen type: M-Clamp Roplat / Tilt type: Belt type Enclosure: Video viewing of wafer loading: No Smoke detectors: Yes Accessories: Source turbo pump: SEIKO SEIKI STP1000C Analyzer turbo pump: SEIKO SEIKI STP300C Beamline turbo pump: SEIKO SEIKI STP1000C Beam line booster pump: No Stage pump: EBARA Load-lock reough pump: EBARA Load-lock pump: Cryo Target cryo pump: Cryo Mainframe Missing parts: Filament P/S ARC P/S Manipulator controller Source magnet P/S Analyzer magnet P/S Q1 Magnet P/S Q2 Magnet P/S Terminal vacuum controller Extraction P/S Extraction stack Extraction surppresion P/S Analyzer chamber assy Scanner assy Setup cup assy Mirror assy Setup cup pre-amp controller Source chamber assy Source head assy Source magnet assy Manipulator assy Source isolation valve assy Lens magnet P/S Source turbo controller Source turbo pump Source roughing pump Terminal D.I filter assy Trek (Scanner) P/S B/L Turbo pump Beam dump cup assy Traveling (Target) faraday assy Left L/L door assy Left L/L pivot assy L/L Isolation valve assy Left L/L cryo pump Target chamber cryo pump Focer (Linear motor) assy with plate assy Right L/L chamber vent module (Filter) PH3 Gas line module assy AsH3 Gas line module assy Scan faraday controller assy Vert. lift orienter controller Uniformity controller Linear motor servo controller Orient controller Left elevator controller D.I Temperature monitor controller Dose integrator controller 1995 vintage.