판매용 중고 VARIAN / AMAT / APPLIED MATERIALS VIISta 80 #293750288
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ID: 293750288
웨이퍼 크기: 8"
빈티지: 2000
Ion implanter, 8"
Laser wafer mapping
EATON 9PX 3000 UPS
AFFINITY RAA-012K-CE55CBC Chiller
Chamber material: Aluminum
SMIF interface: VARIAN interface for ASYST SMIFS
Gas box configuration:
Gas Box: 5 Sticks, HP and SDS2 in use
N2 MFC Size: 1 SLM
Power supply: 208 V, 3 Phase, 50/60 Hz
2000 vintage.
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