판매용 중고 AMAT / APPLIED MATERIALS xR80 Leap II #9329404
URL이 복사되었습니다!
확대하려면 누르십시오




















































































ID: 9329404
웨이퍼 크기: 8"
빈티지: 2002
High current implanter, 8"
Processor module
Beamline module
Source services module
Processor rack
Mobile PC and desktop
Clean room PC
Signal tower
TEM Probe
ISO TX
Mains matching TX
Beamline controllers PSU's and assy:
Pre accel / Mag controller
Beamline Inst
Vacuum controller
Turbo controllers
Focus PSU
Decel PSU
A Mag PSU
Pre A converter PSU
Source mag PSU
Suppression PSU
Beam path components source / Extraction / Flight tube / MRS and PFS assy:
Source head type: IHC
Extraction type: Dual bellows
Flight tube
MRS
Pre-defining
PFS Type: HD
Control system: MOTOROLA 68040 Series
PC based operator interface
Gas cabinet:
SDS Module: AsH3 (SDS) / PH3 (SDS) / BF3 (SDS) / SDS
Purge Module
PSU's Controllers and assy:
Gas and temperature controller
Filament PSU
Arc PSU
Bias PSU
DPS
Pre A HV stack
G2 PSU, 8"
Source ISO TX
Vacuum system:
LEYBOLD 1000C Turbo pump
LEYBOLD 361C MRS Turbo pump
LEYBOLD Turbotronik NT20 Turbo pump controllers
EDWARDS QDP40 Beamline dry pump
CTI-CRYOGENICS OB -10 Side cryo pump
CTI-CRYOGENICS OB -10 Rear cryo pump
CTI-CRYOGENICS 9600 Side cryo compressor, 220 V
CTI-CRYOGENICS 9600 Rear cryo compressor, 220 V
Processor PSU's controller and assy:
Wheel and components
Spin motor
Gripper
Transfer arm
Clip actuator
Blade
A/B Sensor
Tilt assy, 0-7°
PFS DP Box
Beam stop
Beam profiler
Filament PSU (PFS)
Wafer loader:
Carousel
Indexer
W/L Door
Oriented
Cassettes / Trays: (3) Trays
Arm servo PSU
Arm servo controller
Control Rack:
DAQ PDU
Option chassis
Target system installer
W/L Controller
W/L Vacuum
Ground PDU
Target system vacuum
Spin / Scan controller
Direct drive interface
Plasma flood chassis
Amp scanner
Amp spinner
Spin / Scan PDU
Bleed resistor
VME:
CPU Main board
Loop controller
Tetrode source head
80 keV Stack with resistors on top
G2 Power supply side of gas cabinet
G2 Resistor next to source head
Source transformer
ISO Transformer W/L area
Larger beam / Stop
Decal chassis under B/line
HD PFS
Operating system: Windows NT
2002 vintage.
AMAT/APPLIED MATERIALS xR80 Leap II는 사전 제작된 이온 임플랜터 및 모니터입니다. 이 장비는 반도체 제조에 사용되는 웨이퍼 칩 (wafer chip) 과 같이 매우 작은 기판 크기의 이식 및 모니터링을 위해 특별히 설계되었습니다. Leap II는 처리량이 높고 실시간 모니터링이 가능합니다. 도약 II (Leap II) 의 주요 특징은 다양한 임플란트 가스 및 도펀트 소재로 작동 할 수있는 능력입니다. xR80 플랫폼을 사용하여 Leap II는 -100 ° C의 온도에서 정확한 임플란트가 가능합니다. 에너지 범위는 최대 800 keV (implantation process) 입니다. 또한 Leap II는 매우 효율적인 기계식 쿨다운 (cool-down) 장비를 통해 더 빠른 워밍업 및 쿨다운 시간을 제공합니다. 이렇게 하면 주기 시간이 단축되고 프로세스 효율이 향상됩니다. 또한 도약 II (Leap II) 는 인라인 기판 이미징을 수행하여 임플란테이션의 정확성을 보장하는 고해상도 디지털 이미징 시스템을 갖추고 있습니다. 이 장치는 CCD 카메라를 사용하여 기판의 고해상도 디지털 이미지 (digital image) 를 캡처하여 정확한 프로세스 제어를 가능하게 합니다. 이 모니터링 시스템은 프로세스 최적화에 대한 실시간 피드백을 제공합니다. 도약 II (Leap II) 에는 고급 기계, 광학 및 전기 부품을 결합하여 임플란테이션 중 다양한 매개변수의 정확한 측정을 제공하는 고급 웨이퍼 모니터링 도구가 있습니다. 이 모니터링 자산은 잠재적 오류를 감지하고, 오류가 발생하지 않도록 도와줍니다. Leap II의 독보적인 xR80 플랫폼에는 프로세스 추적 및 제어가 향상된 통합 제어 소프트웨어도 있습니다. 이 소프트웨어는 프로세스 최적화 및 프로세스 추적성을 향상시켜 주며, 특정 프로세스 (process) 또는 애플리케이션 (application) 요구 사항에 맞게 사용자 정의할 수 있습니다. 고성능 와프트 분석 (waft analysis) 및 프로세스 제어 시스템 외에도 Leap II 는 자동화된 설치를위한 고급 로봇 모델을 갖추고 있습니다. 이 "로봇 '장비 는 가장 복잡 한 설치 까지도 수행 하는 데 사용 될 수 있으며, 그 로 인해 공정 을 더욱 제어 하고 효율성 을 높일 수 있다. 전반적으로 AMAT xR80 Leap II는 효율적인 이식 및 실시간 기판 분석을 제공하는 강력한 사전 제작 이온 임플란터 및 모니터입니다. 고급 제어 소프트웨어를 통해 프로세스 추적이 가능하며, 통합 로봇 시스템은 자동화된 설치를 제공합니다. 이 장치는 효율적이고 정확한 임플랜테이션을 찾는 반도체 칩 제조업체에 적합합니다.
아직 리뷰가 없습니다