판매용 중고 AMAT / APPLIED MATERIALS PI 9500XR #9228574

Ion implanter, 6" Utility gas: (Gas name) / Pressure / Flow rate Ar (Process Ar) / 6.3Kg/cm² / 0.1 SLM PN2 Process Vent) / 4.2Kg/cm³ / 7 SLM GN2 (Pneumatics) / 6.3Kg/cm^4 / 2 SLM Exhaust (Type): Flow rate (CMM) / Size Beamline / 17, 200 mm Ion source / 5.66, 110 mm Fly tube / 5.66, 110 mm (2) Gas boxes / 5.66, 110 mm Back & control / 11.3, 200 mm Cooling water description: Pressure (Kg/cm²) & flow rate temp (« C) & size Main unit: 4.9, 19-5 20~25, 3/4" Heat exchanger: 4.9, 37.8, 20-25, 1 1/4" Cryo compressor: 4.9, 13.5, 20~25, 1/2" Processor module: Front door: Cylinder swing type Flat notch (5) Cassette trays Carousal Cassette indexer Wafer blade Hollow gripper arm Arm position sensor Orienter sensor Cleanroom I/F monitor: TFT & lightpen VME: Mobile cont module Wheel module: Wheel std 25 h/sinks, 6" Si coated Heat sink: 0°C Standard PFS type Advance PFS power supply Standard scan system type Spin system: DD Motor & motec Tilt angle: 0~7°C PFS Gas panel: Ar bleed box HYT Sensor Ferro seal flow meter Source / Terminal module: Ion source: Bernas type (No ovens) No vaporizer Filament P.S Arc P.S Extraction P.S Extraction suppression P.S: Hitek series 1000 Source magnet extended AMU P.S Post acceleration P.S Maximum post voltage: 160 kV Extraction electrode: Dual bellows MRS chamber exhaust Facility module: DI Water resistance control Internal heat exchanger system Facility entry direction: Bottom entry Gas box module: Gas box type (4) gas modules Purge module high pressure (Ar) Gas module 1 HP (BF3) Gas module 2 SDS (SiF4) Gas module 3 SDS Gas module 4 SDS (AsH3) Vacuum system: Source turbo pump: LEYBOLD TMP-11000 C Source turbo controller: LEYBOLD TMP-11000 C MRS Turbo pump: LEYBOLD TMP-301 MRS Turbo controller: LEYBOLD (2) Wheel chamber cryo pumps: CTI Torr-10 on board (2) Cryo compressors: CTI 9600 Beam line dry pump: EBARA A07 V-B Processor dry pump: EBARA 40 x20 (2) Gas box exhaust flow switches (3) Ground lances Drawings / Manuals SECS Function Light tower Cryo pump removal rails Control module Control module: CRT Monitor No alignment tools DI Water digital indication Mains matching transformer: STD Type (STL) Isolation transformer: STD Type (STL) Utility configuration: Maximum extraction voltage: 220 keV Tool specification: Line power Maximum controller power: 85 kVA Circuit breaker: 400 Amp Input power: 203 VAC, 50/60 Hz, 3 Phase+N 1996 vintage.