판매용 중고 ENTEGRIS Aeronex SK Series EGPS12SK #153774

NH3 purifier, 400 SLM flow rate Safety features: Circuit breaker Over temperature rise condition Hydrogen detector Rate-of-rise detector EMO button Remote EMO Remote alarm Visual alarm Audible alarm Static pressure switch / door interlock Isolated electrical enclosure Single or dual contained plumbing interface Specifications: Gases purified: NH3 Media type: inorganic Contaminants removed: H2O, CO2, O2 Outlet purity: < 1 ppb Operating pressure range: 1136 kPa (60 to 150 PSIG) Pressure drop: < 17 PSI at 90 PSIG and max rated flow Maximum flow rate: 700 SLM Gas operating temperature: -40°C to 60°C Outlet filtration: 0.003 micron at 99.99999999% efficiency Leak rating: 1 x 10^-9 atm cc/sec Facilities: Process gas input: mechanical connection: 3/4" tube stub Process gas output: mechanical connection: 3/4" tube stub Ventilation: Mechanical connection: 4" duct Exhaust flow: 65 CFM Power requirements: Mechanical connection: standard terminal Power requirements: 200-240 VAC Power consumption: 50W at idle and process mode, 1000W during regen Maximum regeneration frequency: 5 days Regeneration gas input 1: Gas: N2 515-929 kPa (60-120 PSIG) Mechanical connection: 1/4" tube stub Regeneration gas input 2: Gas: N2 515-929 kPa (60-120 PSIG) Mechanical connection: 1/4" tube stub Regeneration gas output: Pressure: atmospheric Mechanical connection: 1/4" tube stub Instrument air: Gas and pressure: CDA or N2 at 653-791 kPa (80-100 PSIG) Mechanical connection: 1/4" compression fitting 2010 vintage.