판매용 중고 USHIO UFX-2259B-AMB01 #9375526

Exposure system, parts machine Shutter unit: Exposure area, P/N; 2317-3246 Mask light source Optical parts: Light collecting mirror, P/N: 2306-3208 Plane mirror, P/N: 2836-7583 Projection lens, P/N: UPL-59EX Microscope, P/N: 1000051733 / 3185-0361 Workpiece stage: Beam splitters, P/N: 1000049959 (43.5) Beam splitter, P/N: 1000029070 (11.5) Motor unit (X, Y, Θ), P/N: 3026-0870 Work stage units: Drive shaft pressure wheel unit Drive shaft unit Brake shaft unit Clamp unit Vacuum suction plate Anti-uplifting press wheel group Illumination / Microscope: Light cover light source gate Micrometer (Precision sliding table), P/N: MHS2-13 OMROM Rotary encoder, P/N: E6B2-CWZ6C (2000P/R) Reel receiving and discharging mechanism: AC Motor, P/N: VHR206AGVJ / GV2G250 AC Motor, P/N: 2TK3GN-AGN25K Clutch, P/N: AMC-40 (6) Drive / Brake units: MATSUSHITA AC Servo motor (Drive unit), P/N: MSM5AZP1A MATSUSHITA Motor driver (Drive unit ), P/N: MSD5A1P1EA Clutch, P/N: AMC-5 Piping units: SMC Solenoid valve workpiece blow, P/N: VCW31-5G-2-02-V-B-X41 SMC Solenoid valve workpiece vacuum, P/N: VP542R-5GZ-03A-F SMC Solenoid valve workpiece vacuum, P/N: VCW41-5G-4-02-V-B-X27 SMC Solenoid valve workpiece vacuum, P/N: VCW3134V-02-5GS-B PCB: USHIO Auto micrometer, P/N: PB-1026B USHIO Motor interface, P/N: PB-1017B USHIO Motor interface, P/N: PB-1018B USHIO Rotary encoder I / F, P/N: HC ENC I/F USHIO Shutter control, P/N: PB-1040B NDG Switcher, P/N: PB-1028B-U00 Video IN, P/N: RICE-001 Video OUT, P/N: PLUM-001 MELEC Motor control, P/N: C-864V1 Screen / Peripheral: KEYENCE VT-7S Touch panel display PLC: MITSUBISHI CPU Unit, P/N: Q06HCPU MITSUBISHI Serial data unit, P/N: QJ71C24-R2 MITSUBISHI 64-Point IN unit, P/N: QX40 MITSUBISHI 65-Point OUT unit, P/N: QY50 MITSUBISHI 2-Axis positioning unit, P/N: QD75D2 MITSUBISHI High speed counter, P/N: QD62D MITSUBISHI Memory card, P/N: Q2MEM-8MBA MITSUBISHI QJC1724N MITSUBISHI QJ61BT11N Internal wiring; Sensor line / Communication line PC Host: AUPC Air mount: (4) Balance air cushions ULVAC DA-60S Vaccum pump Static elimination: Ion gun 2009 vintage.