판매용 중고 ELETTRORAVA PECVD Clustertool system #293756310

(5) Chambers Working hours: 1000 Hours Loadlock chamber Dimensions : 300 mm diameter x 350 mm height DN160CF port Substrate holders: DN160ISO DN200CF DN25KF DN40CF DN40KF Substrate: 100 mm x 100 mm Pumping speed: 27 m3/h N2 / 330 l/sec He / 340 l/sec H2 / 300 l/sec Water cooled Control unit ETC300 Rotational speed: 42000 RPM Inlet screen Gas / MFC Size: SiH4 / 100 SCCM CH4 / 100 SCCM NH3 / 200 SCCM N2O / 100 SCCM H2 / 200 SCCM 304 Cylindrical transfer chamber Diameter: 600 mm Height: 270 mm Pump mileage: 1,000 Hours Ultra high vacuum Maximum nominal heater temperature: 750°C Maximum substrate temperature: 400°C Turbomolecular pumps elettrorava ETP300GCR RF Generator Mount gas cabinet SS tubing Safety interlock Frequency 13.56 MHz Power supply: 300 W 2011 vintage..