판매용 중고 CHA E 1000 #9203953

E-Beam evaporator Non load-lock system: Minimum (4) target pockets Load-lock system: Minimum (6) target pockets Ion mill capability with argon Ion beam power: 10kW Capable of handling batch sizes: ≥ 3"x 6" wafers System base pressure: 3x10^-7 Torr Chamber pump down rate to base pressure: Under 60 minutes Lift off dome and planetary holder Wafers that is easily switched out Multiple recipe system controller to auto control deposition rate Load lock preferred CPA E-1000 evap system featuring: Load lock: No (4) Pockets crucible (25CC) with indexing controller TEMESCAL CV-14 14KW E-beam power supply Controller: GP 307 I.G Shutter assembly INFICON Deposition sensor assy Observation port Lift-off fixture One button operation: CHA controllers TELEMARK 880 / 861 Dep rate controller TEMESCAL Sweep controller CTI CT-10 Cryo pump with 8500 compressor Mech pump EOM Specifications Shielding System manuals on CD Specification: O-rings Chamber CV-6S Power supply Valves Bearings Cryo pump and compressor System leak checked using RGA All controllers inspected and Wiring checked and problems Shielding and planets Options: Ion mill Rear mount CV-6 PS With ps Rewire TELEMARK ST-10 Power supply 5CM Ion gun with power supply.