판매용 중고 BALZERS / EVATEC BAV 1250 #9305221
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ID: 9305221
Evaporators
DUO120
WKP1000
DIFF630
Process: Antireflective coatings
6-Position quartz holder
Type: QSK 621 C
(4) Segments
(198) Lenses, dia 65
(140) Lenses, dia 70
(120) Lenses, dia 80
(2) Set of shields
COMMONWELTH SCIENTIFIC Mark II Ion source
Minimum vacuum pressure: 10-5 mBar in 30 minutes with Meissner
Maximum temperature: 150°C
Ceramic heater: 2 kW
EEC 300 Electron beam control system
Crucible type: 6-Position
Substrate holder diameter: 1250 mm
POLYCOLD PFC-1102 HC
EHV 215 Power supply
Electrical cabinet with automate and computer
Power supply: 380 V, 100 A, 3 Phase
1992-1994 vintage.
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