판매용 중고 BALZERS / EVATEC BAV 1250 #293748051

ID: 293748051
Evaporator 630 Diffusion pump Baffle freon DUO 120 Primary pump WKP 1000 Root POLYCOLD PFC 1102 HC Water panel with digital flow meter Quartz head 6-positions EHV 212 Electron gun 6-position, Voltage: 14 kW Mark II Ion gun Infrared heater under substrates, Voltage: 4 kW Joule-effect source MFC Oxygen inlet Substrate holder diameter: 1250 cm Spare parts: EHV 212 Power supply complete with EFS and ECS Gun turret 6-position EHV ECS EFS Control cards Electron gun emitter Substrate holder sector (2) Protection plates.
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