판매용 중고 TRIKON / AVIZA Celsior FXP #293767264
URL이 복사되었습니다!
확대하려면 누르십시오
ID: 293767264
웨이퍼 크기: 8"
빈티지: 2004
Atomic Layer Deposition (ALD) system, 8"
(2) 002-7560-03 Load ports
BROOKS AUTOMATION 003-1600-25 Mainframe robot
BROOKS AUTOMATION 002-7090-04 ATM Robot
(2) UPS
MKS 450 Ozone monitor
EMO Guard ring
Smoke detector
Platform type: Centura II Frame
Process: Oxide etch
Wafer shape: SNNF
Position / Chamber type:
A / Oxide etch (eMax)
B / Oxide etch (eMax)
C / Oxide etch (eMax)
D / Oxide etch (eMax)
F / Orienter
Chamber A, B, C and D:
Process kit
Liner door
Ceramic ESC
Dual magnet
Baratron guage: 1 Torr
Liner: Standard magnet type
EPD: Hot pack
Gas injector
ALCATEL / ADIXEN / PFEIFFER ATH 1600M Turbo pump
0010-11239 HV Module
Gate valve type: Pendium
0010-30686 Match
ENI OEM-28B Generator
Gas delivery options:
Standard component
VERIFLO Valve
MKS 872 Transducer
VERIFLO SQ2 Regulator
MYKROLIS Filter
AERA MFC FC-D980C
Gas panel:
Pallet A and B:
Line / Gas / MFC Size
1 / 1.3 C4F6 / 50 SCCM
2 / C4F8 / 50 SCCM
3 / CO / 500 SCCM
4 / CH2F2 / 50 SCCM
5 / O2 / 50 SCCM
6 / N2 / 300 SCCM
7 / O2 / 2000 SCCM
8 / CF4 / 300 SCCM
9 / CHF3 / 200 SCCM
10 / AR / 1000 SCCM
Pallet C and D:
Line / Gas / MFC Size
1 / H2 / 500 SCCM
2 / NH3 / 500 SCCM
3 / CO / 500 SCCM
4 / CH2F2 / 50 SCCM
5 / O2 / 50 SCCM
6 / N2 / 300 SCCM
7 / O2 / 2000 SCCM
8 / CF4 / 300 SCCM
9 / CHF3 / 200 SCCM
10 / AR / 1000 SCCM
Gas panel features:
Top feed multi line drop hook up
VME II Gas panel controller
Loadlock / Cassette options:
WBLL With auto-rotation
UNIVERSAL Loadlock platform
STANDARD Cassette type supported
KALREZ Loadlock slit valve oring type
Integrated cassette sensor
Transfer chamber options:
Manual lid hoist
Centura VHP+ Robot
AL Blade
Bottom loadlock vent
System controller:
Controller type: 66"
Controller electrical interface: Bottom feed
Top controller exhaust
Controller cover
No adaptor for SECS Port 25-Position
No exhaust duct
No controller IO Interface
No 3-Way switch box
AC Rack:
GFI: 100 mA
AC Rack type: Pri/Sec AC Generator rack, 66"
No UPS
Generator rack:
RF On indicator
No RF Generator rack plexiglas cover
Generator rack water manifold
2004 vintage.
아직 리뷰가 없습니다