판매용 중고 TEL / TOKYO ELECTRON Unity IIe 655PP #293794284
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ID: 293794284
웨이퍼 크기: 6"
빈티지: 2001
Etcher, 6"
Wafer type: Flat
(7) Gas lines
Gases: CF4, CHF3, Ar, N2
DAIHEN MFG-20SA3 RF Generator
FUJIKIN Manual valve
(3) MILLIPORE WG2FT1RR2 Filters
(2) VERIFLO SQ60502PFSMM Regulators
VERIFLO SQ140E502PFSMM Regulator
KURODA B35-2G Regulator
NKS Pressure gauge
NAGANO KEIKI CB14 Pressure switch
Pneumatic valve:
CKD AVB21-X0038-FL Vacuum valve
FUJIKIN General protective valve
VAT 26332-KA71-1001/345 Isolation valve
Gas box:
Size: 100 Φ
Range: 100 CFM
2001 vintage.
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