판매용 중고 SPTS Omega FXP #9192160

Rapier plasma etch system, 6"-8" fxP Wafer transport module DSi Rapier process module Multi-chamber system Configuration: 4-Color alarm tower Bracket-mounted high resolution color Through wall panel PC104 Control architecture Devicenet control module: Pendulum valve MFCs Pneumatics Fore-line convectron Thermocouples Cable to electronics rack: 10m Electronics cabinet fxP Transport module: 8-Port wafer transport module BROOKS AUTOMATION MagnaTran 7 series robot (2) Vacuum cassettes Dynamic wafer aligner DSi Rapier process module: BOSCH Process deep Si module Rapier plasma source Module envelope: Process control hardware PC104 Control unit Primary / Secondary source: (4) ADVANCED ENERGY Apex RF generators High / Low frequency: ADVANCED ENERGY Apex RF generator (Bias) RF Bias match Top power fixed match DC Coil supply Heated VAT pendulum valve Electro-static chuck PSU & He back-pressure control Heated lower chamber DSi Upper chamber & foreline Extracted surface mount gas boxes (1x Primary, 1 x Secondary) ALCATEL ATH2300MT Turbo pump Automated He flow endpoint Turbo by-pass for module roughing Chamber capacitance manometer (1.0 torr) Foreline mini-capacitance manometer Wafer edge protection ring Perfluoroelastomer seals Options: Claritas optical endpoint system Ancillary equipment: BETTATECH CU700 Re-circulating chiller ADIXEN ADP122LM ADIXEN ADS602H NESLAB ThermoFlex 24000 Chiller CLARITAS Optical endpoint system Includes: (2) Manuals CD Conversion kit, 8" Rear control station 2012 vintage.