판매용 중고 SPTS Omega FXP #9186561

Rapier plasma etch system, 8" (3) Electronics control cabinets (4) Main system chillers (5) Upgrade kits, 8" (2) DSI Rapier process module Wafer transport module: fxP Multi chamber system Standard system features: (4) Color alarm towers Bracket-mounted high resolution color TFT Monitor with keyboard Thru wall panel PC104 Control architecture Devicenet control module: Pendulum valve MFCs Pneumatics Fore-line convectron Thermocouples Electronics rack Cable: 10 m Electronics cabinet CE Compliant SEMI -S2 Compliant (2) System manuals on CD Conversion kit, 8" Rear control station fxP Transport module: (8) Port wafer transport modules Brooks MagnaTran 7 series robot (2) Fixed vacuum cassettes Dynamic wafer aligner DSi Rapier process module: Bosch process deep Si module Rapier plasma source Module envelope contains Process control hardware Control unit PC104 AE Apex RF generator: Primary source Secondary source Bias - HF Bias - LF RF Bias match Top power fixed match DC Coil supply Heated VAT pendulum valve Electro-static chuck PSU / He back-pressure control Heated lower chamber DSi Upper chamber / Foreline Extracted surface mount gas boxes: Primary Secondary ALCATEL ATH2300MT turbo pump Automated He flow endpoint Turbo by-pass for module roughing Chamber capacitance manometer (1.0 torr) Foreline mini-capacitance manometer Wafer edge protection ring Perfluoroelastomer seals Options: Claritas optical endpoint system Ancillary equipment: Re-circulating chiller (Bettatech CU700) Chills platen ADIXEN ADP122LM ADIXEN ADS602H THERMO Flex 24000 NESLAB chiller Chills pumps Includes: Main chamber Handler Control cabinet Computer holder (2) Pumps Spare parts 2012 vintage.