판매용 중고 SINGULUS / STANGL Singular XP ISE #293752400

ICP-PECVD System Type: Customized Designed for coating of crystalline silicon solar cells IR heater station (2) ICP-PECVD stations for coating sunny side down with integrated NF3 chamber cleaning by plasma etching process (Silane chambers) (2) ICP-PECVD stations for coating sunny side down with mechanical chamber clean (Metal alkyl chambers) Components: (2) EDWARDS iXH1820 Pumps with power supply, Profibus module D397-52-880 EDWARDS iXL120 Turbomolecular pump (8) EDWARDS STP-iX3006C Turbomolecular pumps (4) EDWARDS STP-1003C Turbomolecular pumps SIEMENS PLC FESTO Pneumatics HAMLET Valves BROOKS MFC (20) MITSUBISHI MR-J3 Servo amplifiers (4) ADVANCED ENERGY, Type Apex® 5708009 HF Generators Sensors LENZE Actuators 2015 vintage.