판매용 중고 SEZ / LAM RESEARCH DV-38F #9022268

System, parts machine Position 1: LD, ULD Ports Robot (Transfer unit): RBT (RS-8240) Ionizer: Controller model 5024 Position 2: Buffer station Robot (Transfer unit): Dual ECO Gripper left/right Robot arm: Al anodized Ionizer: AeroBar model 5285 (e) Horiba HF monitor CM-210 Position 3, 4, 5, 6, 7, 8, 9: PMR1-PMR4, PML1-PML3 Robot (Transfer unit): Rear machine handling - (Twin ECO gripper) Chamber material: PP Chamber shape: Ring type Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chamber lower section: PP Chemical supply piping: PFA Drain piping: PVDF Chamber cleaning: DIW Ionizer: QuadBar 4630-DS ABB Protronic 500 Temp controller: in-line heater controller Position 10: PML4 Robot (Transfer unit): Rear machine handling - (Twin ECO gripper) Chamber material: PP Chamber shape: Ring type Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chamber lower section: PP Chemical supply piping: PFA Drain piping: PVDF Chamber cleaning: DIW Trebor 110R Pump Entegris 0.03um Filter Quickchange disposable filter QCDYATMTF Housing Ionizer: QuadBar 4630-DS Position 11: CHC1L Chamber material: PP Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chemical supply piping: PFA Drain piping: PVDF Siemens heater Almatec chemical drain pump Trebor 110R Pump Entegris 0.03um Filter Quickchange disposable filter QCDYATMTF Housing Levitronix BPS-3 process supply pump Position 12: CHC1L Chamber material: PP Chamber chuck material: PVDF / PETP / Stainless steel Robot arm: PVDF (Pins), PETP (Assembly) Chemical supply piping: PFA Drain piping: PVDF Siemens heater Almatec chemical drain pump Levitronix BPS-3 process supply pump Position 13: Chamber chuck material: Chuck drive unit Al - anodized Megasonic: Honda-Ultrasonic flow meter USF100A type 230 VAC, 1 P+N, 50/60 Hz Max current: 2 A Breaking capacity: 10,000 AIC Does not include chemical supply module.