판매용 중고 SAMCO RIE-200C #293811813
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ID: 293811813
웨이퍼 크기: 8"
Reactive Ion Etcher (RIE), 8"
Cassette-to-Cassette Fully Automatic Operation
Dual cassette configuration
Double-arm atmospheric transfer robot
Atmospheric high-speed transfer system
No conventional load lock required
Automated PLC control
Touch panel operation
Recipe storage
Data logging
High-precision CCP RIE technology
Etch uniformity
Process stability
Applications:
Silicon (Si)
Polysilicon (Poly-Si)
Silicon Dioxide (SiO₂)
Silicon Nitride (SiN)
Photoresist ashing, stripping, descum
Organic contaminant removal.
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