판매용 중고 SAMCO PD-200D #9155559

Automated ion assisted PVCVD systems, 8" Etching and deposition of Carbon films DLC Deposition rate: 20-30um per hour Anisotropic etch rate: 0.25u per min Active substrate temperature control Compound turbo main chamber Auto chamber lift Xinix 1014 Endpoint detector Chemical series Osaka TG-713M 600 lps (3) MFC Gas lines Luxtron 712 Fluroptic thermometer Sierra 5000 Gas leak detector Techware TC-111 process controller 13.5 6MHz solid state generator Iwatsu SG-4101 RF power pulse generator Komatsu DR 621 Isothermal bath temperature controller Luxtron 712 Fluoroptic thermometer Luxtron 1015 End point controller Mitsubishi NF-SF Pressure lugs for circuit breaker Baratron type 622A, 627A and 628A capacitance manometers Neslab RTE-111D Refrigerated bath / Circulator (Chiller) 5RK90GU-AMUL Electromagnetic brake motor TKC REX-F900 Temperature controllers for source MFC and oven Sentry 5000 Gas monitoring system 641PM-26P1-X Adaptive pressure controller 64244-PE52-X Control gate valve Gases: Nitrogen (N), Argon (Ar), Oxygen (O2) for etching DLC films CF4 20-1000 Watts Power: 10.8 KVA 3Φ 208V AC 4.6 KVA 1Φ 115V AC 1996 vintage.