판매용 중고 PVA TEPLA / TECHNICS 400 #9169197

Plasma cleaners Process chamber: Material: Aluminum Volume: 64 Liters Chamber door: Aluminum QUARTZ Inspection window: 100 mm With ultraviolet and high-frequency radiation protection Vacuum system: Process pressure: ~0.2 - 2 mbar Gas and vacuum piping: High-grade steel 1/4" SWAGELOK Connections with aluminum KF components Gas supply: 2 - 4 Separate gas ducts (2) option, metering by mass-flow controller Venting: Solenoid valve and series throttle valve Vacuum: Ultimate pressure: ~0.03 mbar Evacuation time up to 0.5 mbar: ~0.5 minutes Vacuum measurement: Capacitive pressure gauge Measuring range: 0.01 to 10 mbar Microwave generator: Regulated MAGNETRON Frequency: 2.45 GHz Power output: 0-1000 W Fault monitoring: Overload protection Control unit: Process time HF Output Process pressure Gas flow Hardware: Centronics printer interface Silicon keyboard: Numeric keypad Cursor block Softkeys Special function keys Connections: Plug and socket connection: 24V AC Vacuum pump switch-on relay, 1A microfuse Control connection for external vacuum valve: 24 V AC Vacuum connection: DN 63 KF Gas connections: (2) Process gases, supply pressure: 1 - 3 Bar vent connection Supply pressure: 0.5 - 1 Bar Cooling-system exhaust air: Pipe connection 100 mm outside Ø Process gases: Oxygen (O2) Tetrafluoromethane (CF4) Argon (Ar) Helium (He) Nitrogen (N2) Air Nitrous oxide (N2O) Carbon dioxide (CO2) Main power supply: 230 V, 50 / 60 Hz, Protected by 15 A slow-blow fuse Power consumption: 2 kW Without pump 2003 vintage.