판매용 중고 PVA TEPLA Plasma system #293764169

Graphical User Interface (GUI) RF Power generator Precursor Keyboard Tray Stainless steel LCD Touch panel Process pressure: 100-2000 m Torr Process gas: 1.4 - 2.7 bar (20-40 psi) Purge gas: 1.4 - 2.7 bar (30-40 psi) Compressed air: 5.4- 6.8 bar (80-100 psi) (3) Stages with integrated gate valves (3) Mass Flow Control (MFC) gases Options: Capacitance manometer Pressure monitor: 1% Pressure controller Light tower Bar code reader Recirculating liquid chiller Monomer processing kit Heated gas line N2 and H2 Generator Exhaust abatement system Liquid injector system Operating system: Windows Power supply: 380~415 VAC, 3 Phase, 15 A, 50/60 Hz.