판매용 중고 PLASMATHERM Versaline DSE III #293737646
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ID: 293737646
웨이퍼 크기: 4"-8"
빈티지: 2012
Etcher, 4"-8"
Semi-auto load lock
Single wafer
Mechanical clamp with affinity chiller: -40°C to +40°C
ICP RF Generator: 3.5 kW, 2 MHz
High-speed process modulation with DBS RF:1-100kHz for DSE
Heated chamber: 180°C
Optical end point detection
Fast gas switching option for DSE
EDWARDS iH80 Dry pump
EDWARDS XDS35i Load lock dry pump
EDWARDS 1300l/s STPA Turbo pump
Gases / Size:
C4F8 / 400 SCCM
SF6 / 600 SCCM
Ar / 50 SCCM
O2 / 50 SCCM
Non-functional parts in e-rack:
GUI PC
CTC PC
Power supply: 380 VAC, 3 Phase
2012 vintage.
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