판매용 중고 PLASMATHERM SLR 772 #9195260

Etcher, 4" Adapter plates for 2" ALCATEL 5900 Turbo pump 700W ASTEX Microwave power supply: 2.45 GHz RF 5S 555W RF supply: 13.56 MHz Ultra low cooling option: Down to -150°C with LN2 Loadlock (Semi manually controlled with switches) TEKTEMP TKD-100 Heat exchanger ASTEX 1000W Microwave supply Spare ECR head Aluminum showerhead assembly Cooling ring for etch option Deos not include load lock pump Main console electronics Process / Sequence controller Core interface 252C-1-5 Exhaust valve controller AM-5 700 RF Matching network Fixed capacitance loading: 600 pF DC Probe range: 1000 V AMNPS-2A 700 Matching network power supply 290-03 Ion gauge controller 286 Thermocouple gauge controller Heater control box RF-5S RF Generator Output power: 555 Watts, 13.56 MHz HS-700 Microwave generator Output power: 700 Watts, 2.45 GHz Gas panel: Chamber 1: CH1 N2 FSF 20 SCCM CH2 N2 FSF 50 SCCM Chamber 2: CH1 C12 FSF 20 SCCM CH2 N2 FSF 20 SCCM Fluid input panel: Air regulator setting: 80 Psi Pressure switch: 70 Psi Input requirements: Compressed air: 80 Psi Nitrogen: 20 Psi Water: 20 Psi System power center: Line voltage: 208 VAC Maximum current: 60 Amps, 4-wire Motor starter overload current setting Mechanical pump: 6 Amps Vacuum pumps: 023-241 Lock mechanical pump Fluid type: Fomblin 14-6 Charge: 6 Kg TDK 100 Temperature control system Fluid type: 50/50 Glycol Local setpoints CH1: 25°C Aluminum chamber lid with 10" shower head Power: 208 V, 60 Hz, 100 Amp Manuals included.