판매용 중고 OXFORD Plasmalab 133 #293712618

Reactive Ion Etcher (RIE) ADVANCED ENERGY HiLight 136 RF Generator Chamber: Etching chamber Loadlock chamber Chamber turbo pump: ALCATEL ATH 400M ACT 600M Controller Gas lines: Cl2 - 100 SCCM BCl3 - 100 SCCM CH4 - 50 SCCM Ar - 100 SCCM NF3 - 100 SCCM CHF3 - 200 SCCM N2O - 200 SCCM RF Generator power supply: 600 W, 13.56 MHz.