판매용 중고 NORDSON MARCH FlexTRAK #9259852

Plasma treatment systems Equipment clearance: Right and left: 153 mm (6 in) Front and back: 914 mm (36 in) Chamber maximum volume: 5.5 liters (338 in³) Electrodes configuration: Power - ground Ground - power Power - power Working area: 305 W x 305 D mm RF Power: Standard wattage: 600 W Frequency: 13.56 MHz Gas control: Flow volumes: 10, 25, 50, 100, 250 or 500 sccm (4) MFCs Control and interface: EPC With PC-Based touch screen interface Remote interface: SMEMA, SECS/GEM Vacuum pump: Standard dry pump: 16 cfm N2 Purged pump flow: (2) slm Process gas fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Process gas purity: Lab or electronic grade Process gas pressure: 0.69 bar (10 psig) min. to 1.03 bar (15 psig) max Purge gas fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Purge gas purity: Lab or electronic grade N2/CDA Purge gas pressure: 2 bar (30 psig) min to 6.9 bar (100 psig) max Pneumatic valves fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Pneumatic gas purity: CDA Oil free Dewpoint: ≤7°C (45°F) Particulate size: <5µm Pneumatic gas pressure: 3.45 bar (50 psig) min to 6.89 bar (100 psig) max Exhaust: 25.4 mm OD Pipe flange SEMI: S2/S8 (EH and S/Ergonomics) Ancillary equipment: Gas generators: Nitrogen, hydrogen Chiller Scrubber Power supply: 220 VAC, 15 A, 50/60 Hz, Single-Phase, 12 AWG, 3-Wire CE Marked.