판매용 중고 NORDSON / MARCH AP-1500 #293759939

Plasma system Chamber maximum volume: 442 liters (27,000 in³) Electrode shelfs: (2) Powered (2) Ground RF Power: Standard wattage: 2000 W Frequency: 40 KHz Gas control: (4) MFCs Control and interface: Software control: EPC with PC-Based touch screen interface Remote interface: SMEMA, SECS/GEM Vacuum pump: Dry pump: 65 cfm (50/60 Hz) Electrodes: Variable electrode configurations: Direct Downstream Process gas fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Process gas purity: Industrial grade or better Process gas pressure: 0.69 bar (10 psi) min. to 1 bar (15 psi) max Purge gas fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Purge gas purity: Industrial grade N2/CDA Purge gas pressure: 2 bar (30 psi) min to 5.5 bar (80 psi) max Pneumatic valves fitting size and type: 6.35 mm (0.25 in.) OD SWAGELOK Tube Pneumatic gas purity: CDA Oil free Dewpoint: ≤7°C (45°F) Particulate size: <5μm Pneumatic gas pressure: 3.45 bar (50 psi) min to 5.5 bar (80 psi) max Exhaust: 38 mm (1.5 in.) OD Pipe flange SEMI: E10, S2/S8 Gas generators: Nitrogen, hydrogen. Chiller Scrubber.