판매용 중고 MATTSON Aspen III #293695997

제조사
MATTSON
모델
Aspen III
ID: 293695997
웨이퍼 크기: 12"
빈티지: 2004
ICP System, 12" Front interface Transfer module Transfer robot AC Rack (2) Process modules (Chamber 2 and 3) (4) Load ports (2) Guardrails (4) Faraday shields, Quartz tubes and Screws Power cable, 7 M (2) Signal cables: 30 M (2) VAT Valves Monitor PC Endpoint detector PC 2004 vintage.
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