판매용 중고 LAM RESEARCH TCP 9600 SE #9226415

Metal etcher, 8" Gas box MFC Temperature controller Process kit: EPD Sensor Chuck type: Mechanical (12) Board checkers MKS: 13.32 PA P/C ESC VAT Valve SBC Board type: BOSS Video board type: Floppy disk VME Type: Hard disk controller slot WPS Sensor Slit valve: Mini controller Robot type: Cassette handler STO Elevator type: I/O Wafer sensor EPD Exhaust line RF Match: L/L Purge, L/L slow vent RF Generator type: P/C Metal etcher (8) Motor drivers CPU TAITEC CH-800B H/E Chiller Dry pump Gauge type: TC XLL Wafer sensor Monitor Gas panel TCP Top & bottom generator: ADVANCED ENERGY RFG 1250 Bias Chamber A: O2: 200 SCCM CF4: 100 SCCM O2: 2000 SCCM H2O: 500 SCCM CHF3: 20 SCCM N2: 50 SCCM CL2: 200 SCCM BCL3: 200 SCCM Turbo pump: EDWARD SCU H1000C EDWARD STP-1000 Standalone Autoloader type STP H1000 with TMP Bottom match Wafer shape: Flte No SMIF interface MF Facilities APM Chamber ELL Arm Load port GEM & SESC Interface Cassette stage XLL Arm RF Generator Chamber type: 9600 Chamber process: Metal Manometer: 0.1 mT Millipore Standard cooling water Top & bottom RF match Gate valve & Throttle valve: Pendulum valve STP H-1000L Turbo controller Standard 4-pin cylinder EPD Controller: 703/261.8 Chamber gases: Gases / MFC Size / Gas name / MFC Maker / MFC Model number Gas 1 / 300 / N2 / AERA / FC-780C Gas 2 / 200 / N2 / AERA / FC-780C Gas 3 / 50 / N2 / AERA / FC-780C Gas 6 / 3000 / N2 / AERA / FC-780C Gas 7 / 200 / N2 / AERA / FC-780C Gas 8 / 200 / N2 / AERA / FC-780C Missing parts: VDS Side covers DSQ Chamber APM Chuck motor DI Nozzle WVDS Includes: AC Rack Cable Signal cable box Power: 208V 1996 vintage.